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|3 8 10nm ASML 3 8 7nm DUV TWINSCAN NXT 2000i TWINSCAN NXT 2050i NXT 1980i 10nm 10 14nm ASML g-line EUV ASML EUV ArFi ArF 100%96%88%2023 60 15%7nm 10nm(688012)(300567)(688037)-U(688072)(002371)/2023 03 13 021-63325888*8514 S0860514050005 BPT856 S0860522090002 2022-12-05 2022-12-02 2022-08-29 2022-07-14 2 1.4 2.6.8.8 YWBYyRrMoNoPoQoNrMsNqRaQdNaQpNnNpNtQfQrRnOiNmNmQ6MoOvNvPrMnRvPrQxP 3 1.4 2 ASML.4 3.5 4 TOP3-2021.5 5 2019.6 6 2021 TOP3.6 7-ASML.6 8.6 9.7 10 2021.7 4 1 3 8 ASML 3 8 1 数据来源：东方 证券研 究所整 理 10nm ASML DUV TWINSCAN NXT 1980Di TWINSCAN NXT 2000i TWINSCAN NXT 2050i 2000i 2050i ASML NXT 2000i NXT 2000i 7nm NXT 1980i 10nm 10 14nm 2 ASML EUV TWINSCAN NXE:3600D 5 3 DRAM EUV TWINSCAN NXE:3400C 7 5 EUV DUV TWINSCAN NXT:2050i 1.35 NA 193 nm 40 nm(c-)38 nm()26 x 33 mm 4 TWINSCAN NXT:2000i 2.5 nm TWINSCAN NXT:1980Di 1.35 NA 193 nm 38 nm 10nm 26 x 33 mm TWINSCAN NXT:1470 4.5 nm-300 5 TWINSCAN XT:1460K 57 nm TWINSCAN XT:1060K 248 NA 300 TWINSCAN NXT:870 110 nm 300 mm TWINSCAN XT:860N 110 200 300 TWINSCAN XT:860M 300 110 TWINSCAN XT:400L 200 300 220 ASML 5 g-line i-line KrF ArF EUV TOP3 2021 EUV i-line ArFi KrF ArF 9%32%18%36%5%ASML ASML Nikon Canon 90%ASML 75 Nikon Canon 13 6 ASML EUV ASML 100%ArFi ArF 96%88%3 4 TOP3-2021 ChipInsights 32%36%5%18%9%i lineKrFArFArFiEUV 6 5 2019 6 2021 TOP3 SEMI ChipInsights nm nm 7-ASML 8 90%99%99.9%99.99%99.999%0.0%0.7%60.6%95.1%99.5%ASML ChipInsights 2 23 2023 60 2022 75%13%6%6%ASMLNikonCanon 050100150200250300350ASML Nikon CanonEUV ArFi ArF KrF i line 7 9 15%PECVD 10%10 2021 SEMI 0501001502002503003504004505002017 2018 2019 2020 2021 2022 2023E 8 7nm 10nm(688012)(300567)(688037)-U(688072)(002371)9 Tabl e_Disclai mer 12/15%5%15%-5%+5%-5%5%-5%+5%-5%HeadertTabl e_Discl ai mer HeadertTabl e_Address 318 26 021-63325888 021-63326786 Tabl e_Disclai mer 前沿报告库是中国新经济产业咨询报告共享平台。行业范围涵盖新一代信息技术、5G、物联网、新能源、新材料、新消费、大健康、大数据、智能制造等新兴领域。为企事业单位、科研院所、投融资机构等提供研究和决策参考。扫一扫免费获取海量报告
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